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Dynamic optical methods for direct laser written waveguides

Abstract:
Direct laser writing is widely used to fabricate 3D waveguide devices by modi cation of a materials refractive index. The fabrication delity depends strongly on focal spot quality, which in many cases is impaired by aberrations, particularly spherical aberration caused by refractive index mismatch. We use adaptive optics to correct aberration and maintain fabrication performance at a range of depths. Adaptive multifocus methods are also shown for increasing the fabrication speed for single waveguides. © 2013 Copyright SPIE.
Publication status:
Published

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Publisher copy:
10.1117/12.2005054

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Institution:
University of Oxford
Division:
MPLS
Department:
Engineering Science
Role:
Author
Journal:
ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS VI
Volume:
8613
Publication date:
2013-01-01
DOI:
ISSN:
0277-786X
Source identifiers:
404944
Language:
English
Keywords:
Pubs id:
pubs:404944
UUID:
uuid:35f3f931-ce5d-4ae0-97a7-5eff843fca05
Local pid:
pubs:404944
Deposit date:
2013-11-17

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