Journal article
Dynamic optical methods for direct laser written waveguides
- Abstract:
- Direct laser writing is widely used to fabricate 3D waveguide devices by modi cation of a materials refractive index. The fabrication delity depends strongly on focal spot quality, which in many cases is impaired by aberrations, particularly spherical aberration caused by refractive index mismatch. We use adaptive optics to correct aberration and maintain fabrication performance at a range of depths. Adaptive multifocus methods are also shown for increasing the fabrication speed for single waveguides. © 2013 Copyright SPIE.
- Publication status:
- Published
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- Publisher copy:
- 10.1117/12.2005054
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Authors
Bibliographic Details
- Journal:
- ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS VI
- Volume:
- 8613
- Publication date:
- 2013-01-01
- DOI:
- ISSN:
-
0277-786X
- Source identifiers:
-
404944
Item Description
- Language:
- English
- Keywords:
- Pubs id:
-
pubs:404944
- UUID:
-
uuid:35f3f931-ce5d-4ae0-97a7-5eff843fca05
- Local pid:
- pubs:404944
- Deposit date:
- 2013-11-17
Terms of use
- Copyright date:
- 2013
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